Hirai Yoshihiko | Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuencho, Naka-ku, Sakai 599-8531, Japan

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• Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuencho, Naka-ku, Sakai 599-8531, Japanの論文著者

Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuencho, Naka-ku, Sakai 599-8531, Japan | 論文

• Si Etching with High Aspect Ratio and Smooth Side Profile for Mold Fabrication

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