Hirokane Takaaki | Department of Precision Science and Technology, School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

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• 同名の論文著者
• Department of Precision Science and Technology, School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japanの論文著者

Department of Precision Science and Technology, School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan | 論文

• Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy

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