Shin Chee | Department of Chemical Engineering, Ajou University

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• 同名の論文著者
• Department of Chemical Engineering, Ajou Universityの論文著者

Department of Chemical Engineering, Ajou University | 論文

• Effects of Wafer Cleaning on the Interconnect Structure and Its Electrical Properties during the Al Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices

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