Kim Byung-Sung | School of Materials Science and Engineering and Nano Systems Institute-National Core Research Center, Seoul National University, Seoul 151-742, Korea

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School of Materials Science and Engineering and Nano Systems Institute-National Core Research Center, Seoul National University, Seoul 151-742, Korea | 論文

• Sensitivity Characteristics of Positive and Negative Resists at 200 kV Electron-Beam Lithography

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