Nakano Tadashi | LSI Research Center, Technical Research Division, Kawasaki Steel Corporation
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概要
LSI Research Center, Technical Research Division, Kawasaki Steel Corporation | 論文
- Characterization of Direct-Contact Via Plug Formed by Using Selective Aluminum Chemical Vapor Deposition
- Metalorganic Chemical Vapor Deposition of Aluminum-Copper Alloy Films
- Improvement of Gap-Filling Property of O_3-tetraethylorthosilicate (TEOS) Film by Ethanol Surface Treatment
- Diffusion Barrier Effects Against Cu of W -N Layer Formed by Electron Cyclotron Resonance Plasma Nitridation on W Layer