Yang Kyung | Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea

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• Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Koreaの論文著者

Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea | 論文

• Selective Etching of Magnetic Tunnel Junction Materials Using CO/NH₃ Gas Mixture in Radio Frequency Pulse-Biased Inductively Coupled Plasmas (Special Issue : Dry Process)

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