Yokoi Takahiro | ULSI Laboratory, Mitsubishi Electric Corporation,

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• Yokoi Takahiroの詳細を見る
• 同名の論文著者
• ULSI Laboratory, Mitsubishi Electric Corporation,の論文著者

ULSI Laboratory, Mitsubishi Electric Corporation, | 論文

• Effects of Charge Build-up of Underlying Layer by High Aspect Ratio Etching
• Effect of Electron Shading on Gate Oxide Degradation
• Reduction of Charge Build-Up with Pulse-Modulated Bias in Pulsed Electron Cyclotron Resonance Plasma

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