Inaba Hiroshi | Storage Technology Research Center, Research & Development Group Hitachi, Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

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• Storage Technology Research Center, Research & Development Group Hitachi, Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japanの論文著者

Storage Technology Research Center, Research & Development Group Hitachi, Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan | 論文

• Filtered Cathodic Vacuum Arc Process Conditions and Properties of Thin Tetrahedral Amorphous Carbon Films

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