NAKAO Masao | Microelectronics Research Center, Sanyo Electric Co., Ltd.
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概要
Microelectronics Research Center, Sanyo Electric Co., Ltd. | 論文
- Crystal Growth of Low-Temperature Processed Poly-Si by Excimer Laser Annealing - Dependences of Poly-Si Grain on Energy Density and Shot Number -
- Influence of Hydrogen in a-Si on Recrystallization of Low-Temperature Processed Poly-Si Film by Excimer Laser Annealing
- Study of Crystal Growth Mechanism for Poly-Si Film Prepared by Excimer Laser Annealing
- Grain Morphology of Recrystallized Polycrystalline-Si Film by Excimer Laser Annealing
- Characterization of Poly-Silicon Film Prepared by Excimer Laser Annealing