KITOH Hideyuki | MOS LSI Division, Semiconductor Company, Sony Corporation
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概要
MOS LSI Division, Semiconductor Company, Sony Corporation | 論文
- Formatin of SiOF Films by Plasma-Enhanced Chemical Vapor Deposition Using (C_2H_5O)_3SiF
- New Systematic Evaluation Method for Attenuated Phase-Shifting Mask Specifications