Fukuda Takuya | Environmentally Benign Process Technology Laboratory, Semiconductor Technology Research Department, Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244-0817, Japan

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• Environmentally Benign Process Technology Laboratory, Semiconductor Technology Research Department, Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244-0817, Japanの論文著者

Environmentally Benign Process Technology Laboratory, Semiconductor Technology Research Department, Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa 244-0817, Japan | 論文

• Analysis of Leakage Current in Cu/SiO2/Si/Al Capacitors under Bias-Temperature Stress

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