Onuki Jin | Department of Materials Science and Engineering Ibaraki University, Hitachi, Ibaraki 316-8511, Japan

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• Department of Materials Science and Engineering Ibaraki University, Hitachi, Ibaraki 316-8511, Japanの論文著者

Department of Materials Science and Engineering Ibaraki University, Hitachi, Ibaraki 316-8511, Japan | 論文

• Filling 80-nm-Wide and High-Aspect-Ratio Trench with Pulse Wave Copper Electroplating and Observation of the Microstructure

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