NAKABAYASHI Ichiro | The University of Tokushima, Faculty of Engineering
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概要
The University of Tokushima, Faculty of Engineering | 論文
- Reactive Planar Magnetron Sputtering System with Obliquely Facing Targets of Zn : Thin Films
- Characterization of the Oxidized β-Si_3N_4 Whisker Surface Layer Using XPS and TOF-SIMS