Hanaki Katsuyuki | Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
スポンサーリンク
概要
- Hanaki Katsuyukiの詳細を見る
- 同名の論文著者
- Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japanの論文著者
関連著者
-
Kimura Takashi
Graduate School Of Engineering Nagoya Institute Of Technology
-
Hanaki Katsuyuki
Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
-
Kimura Takashi
Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
著作論文
- Comparison of Plasma Parameters Measured in Inductively Coupled Ar/C4F8/O2 and Ar/CF4/O2 Plasmas
- Probe Measurements and Optical Emission Spectroscopy in Inductively Coupled Ar/CF4, Ar/NF3, and Ar/SF6 Discharges