Kimura Takashi | Graduate School of Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan

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概要

• Kimura Takashiの詳細を見る
• 同名の論文著者
• Graduate School of Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japanの論文著者

関連著者

• Kimura Takashi

  Graduate School Of Engineering Nagoya Institute Of Technology

• Kimura Takashi

  Graduate School of Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan

• Noto Masahisa

  Graduate School of Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan

著作論文

• Dependences of Plasma Parameters on Dilution Gas Content in Inductively Coupled C2F6/Ar and C2F6/O2 Discharges

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