Yutani Akie | LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technology Corp., 4-1, Mizuhara, Itami, Hyogo 664-0005, Japan

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• 同名の論文著者
• LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technology Corp., 4-1, Mizuhara, Itami, Hyogo 664-0005, Japanの論文著者

LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technology Corp., 4-1, Mizuhara, Itami, Hyogo 664-0005, Japan | 論文

• Pt/BaxSr(1-x)TiO3/Pt Capacitor Technology for 0.15 μm Embedded Dynamic Random Access Memory

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