Jin Yin | Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Road VI, Science-Based Industrial Park, Hsin-Chu 300, Taiwan, R.O.C.

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• Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Road VI, Science-Based Industrial Park, Hsin-Chu 300, Taiwan, R.O.C.の論文著者

Advanced Module Technology Division, Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Road VI, Science-Based Industrial Park, Hsin-Chu 300, Taiwan, R.O.C. | 論文

• Effects of Base Oxide Thickness and Silicon Composition on Charge Trapping in HfSiO/SiO2 High-$k$ Gate Stacks

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