Furuya Kenji | Department of Molecular and Material Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

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概要

• Furuya Kenjiの詳細を見る
• 同名の論文著者
• Department of Molecular and Material Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japanの論文著者

関連著者

• Furuya Kenji

  Department Of Molecular And Material Sciences Kyushu University

• Hatano Yoshihiko

  Department Of Chemistry Tokyo Institute Of Technology

• Hatano Yoshihiko

  Department of Molecular and Material Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

• Furuya Kenji

  Department of Molecular and Material Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

著作論文

• Quantitative Analysis of CF4 Produced in the SiO2 Etching Process Using $c$-C4F8, C3F8, and C2F6 Plasmas by In Situ Mass Spectrometry

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