Lin Shyh-Jye | Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei, Taiwan, R.O.C.

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Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei, Taiwan, R.O.C. | 論文

• A Modified Capacitance–Voltage Method Used for $L_{\text{eff}}$ Extraction and Process Monitoring in Advanced 0.15 $\mu$m Complementary Metal-Oxide-Semiconductor Technology and Beyond

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