SHIN Kyeong | Process Engineering Dept. 5, HYNIX Electronics Industries Co., Ltd.
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Process Engineering Dept. 5, HYNIX Electronics Industries Co., Ltd. | 論文
- Shallow Trench Isolation Top Corner Rounding Using Si Soft Etching Following Diluted Hydrofluorine Solution
- ZETA Potential Induced Particle Generation in SC2 Cleaning