Nakamatsu Ken-ichiro | Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan

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概要

関連著者

Nakamatsu Ken-ichiro
Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer
Matsui Shinji
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
Nakamatsu Ken-ichiro
Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
Okada Makoto
Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan

著作論文

Fabrication of High-Aspect Si Structures by Deep Reactive Ion Etching Using Hydrogen Silsesquioxane Masks Replicated by Room Temperature Nanoimprinting

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