KIM Jae-Hak | Process Development Team, Semiconductor R&D center, Samsung Electronics
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概要
Process Development Team, Semiconductor R&D center, Samsung Electronics | 論文
- Electrical Properties of Crystalline Ta_2O_5 with Ru Electrode
- Electrical Properties of Ru/Ta_2O_5/Ru Capacitor for 1 Giga-Scale DRAMs and Beyond