FURUKAWA Masakazu | Semiconductor Engineering Laboratory, Pioneer Electronic Co.
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概要
Semiconductor Engineering Laboratory, Pioneer Electronic Co. | 論文
- Low Resistance Al/Si Ohmic Contacts on Boron Implanted Shallow p^+ Si Layers Formed by Halogen Lamp Annealing
- Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.