Okamura Soichiro | Graduate School ofMateriafi Science, Nara Iostirure of Science and Technology (NAIST)

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Graduate School ofMateriafi Science, Nara Iostirure of Science and Technology (NAIST) | 論文

• Fabrication of Ferroelectric Microcapacitors with Self-Aligned Top Electrodes by Electron-Beam-Induced Patterning Process

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