SHUR M. | Department of Electrical Engineering, University of Minnesota
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概要
Department of Electrical Engineering, University of Minnesota | 論文
- Influence of Interface Structure on Chemical Etching Process for Air Gap of Microelectromechanical System Based on Surface Micromachining
- Characteristics of Pb(Zr_Ti_O_3 Films Deposited by Metalorganic Decomposition on Pt/Ti/TiO_2/polysilicon/Si_3N_4/Si for Pizoelectric Microelectromechanical System Devices
- 28p-WB-1 Microscopic Mechanisms of Surface Segregation during the Growth of GaAs:Sn *
- 4 × 4 Matrix Method for Biaxial Media and Its Application to Liquid Crystal Displays