UCHIDA Hideo | Department of Electrical ad Computer Engineering, Nagoya Institute of Technology
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- Department of Electrical ad Computer Engineering, Nagoya Institute of Technologyの論文著者
Department of Electrical ad Computer Engineering, Nagoya Institute of Technology | 論文
- Applicability of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator
- Retarded Diffusion of Phosphorus in Silicon-on-Insulator Structures