Yoon Jin-Young | Process Development Team, Semiconductor R&D Center, Samsung Electronics, San #24, Nongseo-Ri, Giheung-Eup, Yongin-City, Gyeonggi-Do 449-711, Korea

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• Process Development Team, Semiconductor R&D Center, Samsung Electronics, San #24, Nongseo-Ri, Giheung-Eup, Yongin-City, Gyeonggi-Do 449-711, Koreaの論文著者

Process Development Team, Semiconductor R&D Center, Samsung Electronics, San #24, Nongseo-Ri, Giheung-Eup, Yongin-City, Gyeonggi-Do 449-711, Korea | 論文

• Simulation of Photoresist Thermal Flow Process with Viscous Flow Model

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