Shima Akio | Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan

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概要

• Shima Akioの詳細を見る
• 同名の論文著者
• Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japanの論文著者

関連著者

• Hiraiwa Atsushi

  Micro Device Division Hitachi Ltd.

• Shima Akio

  Micro Device Division Hitachi Ltd.

• Hiraiwa Atsushi

  Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan

• Shima Akio

  Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan

著作論文

• Ultra-Shallow Junction Formation by Non-Melt Laser Spike Annealing and its Application to Complementary Metal Oxide Semiconductor Devices in 65-nm Node

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