Kim Sungryul | Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Jisa-dong, Gangseo-gu, Busan 618-230, Korea

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概要

関連著者

Jeong Haedo
School Of Mechanical Engineering Pusan National University
Jeong Sukhoon
Precision Manufacturing System Division, Graduate school of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
Kim Hyoungjae
Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Korea Institute of Industrial Technology, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
Joo Sukbae
Precision Manufacturing System Division, Graduate school of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
Kim Sungryul
Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
Kim Hyoungjae
Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Jisa-dong, Gangseo-gu, Busan 618-230, Korea

著作論文

Effect on Two-Step Polishing Process of Electrochemical Mechanical Planarization and Chemical–Mechanical Planarization on Planarization

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