MITA Makoto | LIMMS/CNRS-IIS the University of TOKYO, CREST/JST
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概要
LIMMS/CNRS-IIS the University of TOKYO, CREST/JST | 論文
- A Silicon Shadow Mask with Unlimited Patterns and a Mechanical Alignment Structure by Al-Delay Masking Process (特集:立体的微細加工)
- EFFECT OF MAGNETIZATION ORIENTATION AND MAGNETIC BIAS FIELD IN A MAGNETOSTRICTIVELY-ACTUATED, SILICON-BASED MICROACTUATOR
- Magneto-Mechanical F. E. Modelling of an Electromagnetic Bi-Stable μSwitch
- Integration of Microoptics in Bio-Micro-Electro-Mechanical Systems towards Micro-Total-Analysis Systems
- Towards Mechanical Characterization of Biomolecules by MNEMS Tools