Kuwano Noriyuki | Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

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• Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japanの論文著者

Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan | 論文

• Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polycrystalline-Si Thin Film on SiO2 Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma

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