Ohtsu Yasunori | Department of Electrical and Electronic Engineering, Saga Univerity, 1 Honjyo-machi, Saga 840-8502, Japan

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• Department of Electrical and Electronic Engineering, Saga Univerity, 1 Honjyo-machi, Saga 840-8502, Japanの論文著者

Department of Electrical and Electronic Engineering, Saga Univerity, 1 Honjyo-machi, Saga 840-8502, Japan | 論文

• Time-Averaged Energy Distribution Function of Ions Impacted on an RF-biased Substrate in Electron Cyclotron Resonance Microwave Plasma

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