WADA Atsushi | Microelectronics Research Center, SANYO Electric Co., Ltd.,
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概要
Microelectronics Research Center, SANYO Electric Co., Ltd., | 論文
- Low-Temperature Oxidation of Silicon by O_2 Cluster Ion Beams
- A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams
- Development of a super low-noise GaAs FET amplifier for PHS
- Quantification of Electrical Deactivation by Triply Negative Charged Ga Vacancies in Highly Doped Thin GaAs Layers
- Excellent Thermally-Stable Epitaxial Channel for Implanted Planar-Type Hetero-Junction Field-Effect Transistors