Kawamura Akio | Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

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概要

関連著者

Kawamura Akio
Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
Harazaki Katsuhiko
Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
Yoshioka Tasuku
Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
Ohmori Kiyoshige
Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
Satoh Masayuki
Advanced Technology Development Laboratories, Electronic Components and Devices Development Group, Sharp Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

著作論文

Restricted Optical Proximity Effect Correction Pattern Generation Based on Optical Proximity Effect Correction-Design for Manufacturability Rule in Model-Based Optical Proximity Effect Correction: Application for Metal Layer in Complementary Metal–Oxide–S

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