Hsu Wei | Department of Power Mechanical Engineering, National Tsing Hua University, 101, Section 2 Kuang Fu Road, Hsinchu, Taiwan 30013, R.O.C.

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• Department of Power Mechanical Engineering, National Tsing Hua University, 101, Section 2 Kuang Fu Road, Hsinchu, Taiwan 30013, R.O.C.の論文著者

Department of Power Mechanical Engineering, National Tsing Hua University, 101, Section 2 Kuang Fu Road, Hsinchu, Taiwan 30013, R.O.C. | 論文

• Effect of Back Mold Grooves on Improving Uniformity in Nanoimprint Lithography

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