Matsuda Yoshinobu | Department of Electrical Engineering and Computer Science, Nagasaki University, 1-14 Bunkyo, Nagasaki 852, Japan

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Department of Electrical Engineering and Computer Science, Nagasaki University, 1-14 Bunkyo, Nagasaki 852, Japan | 論文

• Relation between Plasma Parameters and Film Properties in DC Reactive Magnetron Sputtering of Indium-Tin-Oxide

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