Hane Kazuhiro | Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

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• Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japanの論文著者

Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan | 論文

• Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device

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