OHATA Keiichi | NEC Corporation, Microelectronics Research Laboratories

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概要

• 同名の論文著者
• NEC Corporation, Microelectronics Research Laboratoriesの論文著者

NEC Corporation, Microelectronics Research Laboratories | 論文

• Plasma-Deposited Silicon Nitride Films from SiF_2 as Silicon Source
• Plasma-Enhanced Chemical Vapor Deposition of Fluorinated Silicon Nitride
• Strained N-Ga_Al_As/In_xGa_As/GaAs Modulation-Doped Structures

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