Kikuchi Atsushi | School of Metallurgy, Division of Engineering, Grauate Schools Tohoku University

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School of Metallurgy, Division of Engineering, Grauate Schools Tohoku University | 論文

• Microstructures of Al/Al_2 O_3 Composite Bodies Obtained by Reaction between SiO _2 and Molten Al at Temperatures Ranging from 1073 to 1473K
• CVD Process Simulation for TiN, Mo. Film Growth Rate Distributions

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