Chen Alek | TDC, ASML Taiwan, Ltd., No. 59, Ke-Ji 6th Rd., Hwa-Ya Technology Park, Gueishan Township, Taoyuan County 33383, Taiwan

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概要

• Chen Alekの詳細を見る
• 同名の論文著者
• TDC, ASML Taiwan, Ltd., No. 59, Ke-Ji 6th Rd., Hwa-Ya Technology Park, Gueishan Township, Taoyuan County 33383, Taiwanの論文著者

関連著者

• Chen Alek

  TDC, ASML Taiwan, Ltd., No. 59, Ke-Ji 6th Rd., Hwa-Ya Technology Park, Gueishan Township, Taoyuan County 33383, Taiwan

• Tseng Shih-En

  TDC, ASML Taiwan, Ltd., No. 59, Ke-Ji 6th Rd., Hwa-Ya Technology Park, Gueishan Township, Taoyuan County 33383, Taiwan

著作論文

• Extreme Ultraviolet Process Optimization for Contact Layer of 14 nm Node Logic and 16 nm Half Pitch Memory Devices

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