Lim Jong | Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea

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• Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Koreaの論文著者

Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea | 論文

• Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O

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