Okuno Y | Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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- 奥野 泰利の詳細を見る
- 同名の論文著者
- Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporationの論文著者
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation | 論文
- A Wafer-Level Burn-in Technology : Realization of Stable Contact Resistance for Al Bond Pads
- Contact Hole Etch Scaling toward 0.1 μm
- Low-Temperature Preparation of Pb(Zr,Ti)O_3 Thin Filmson (Pb,La)TiO_3 Buffer Layer by Multi-Jon-Beam Sputtering
- Preparation of Pb-Based Ferroelectric Thin Films at Room Temperature Using Excimer-Laser-Assisted Multi-Ion-Beam Sputtering
- Preparation of La-Modified Lead Titanate Thin Films by Rf-Magnetron Sputtering Method and Their Pyroelectric Properties