Nakagawa Hideo | Association Of Super-advanced Electronics Technologies (aset):(present Address)ulsi Process Technolo

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Association Of Super-advanced Electronics Technologies (aset):(present Address)ulsi Process Technolo | 論文

• CF and CF_2 Radical Densities in 13.56-MHz CHF_3/Ar Inductively Coupled Plasma(Nuclear Science, Plasmas, and Electric Discharges)

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