SATO Masaaki | NTT System Electronics Laboratories

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概要

• 同名の論文著者
• NTT System Electronics Laboratoriesの論文著者

関連著者

• SATO Masaaki

  NTT System Electronics Laboratories

• KAWAI Yoshio

  NTT System Electronics Laboratories

• Sato Masaaki

  Ntt System Electronics Laboratories:(present Address) Research & Development Headquarters New Japan Radio Co. Ltd.

著作論文

• Precise Control and Resizing of Polysilicon Gate Length by Hard-Mask Etching
• Dopant-dependent Ion Assisted Etching Kinetics in Highly Doped Polysilicon Reactive Ion Etching

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