Gottscho Richard | At&t Bell Laboratories
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概要
関連著者
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GOTTSCHO Richard
AT&T Bell Laboratories.
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Gottscho Richard
At&t Bell Laboratories
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Bailey Iii
At&t Bell Laboratories:(present Address)pmt-plasma And Materials Technologies
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Bailey III
AT&T Bell Laboratories
著作論文
- Real-Time Monitoring of Silicon Nitride Composition During Plasma Enhanced Chemical Vapor Deposition