Lucovsky Gerald | North Carolina State University Departments Of Physics Materials Science And Engineering And Electri
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North Carolina State University Departments Of Physics Materials Science And Engineering And Electri | 論文
- Low-Thermal-Budget Process-Controlled Monolayer Level Incorporation of Nitrogen into Ultra-Thin Gate Dielectric Structures : Applications to MOS Devices
- Controlled Nitrogen Incorporation at Si-SiO_2 Interfaces by Remote Plasma-Assisted Processing
- Local Atomic Bonding in Fluorinated Silicon Oxides : Static Dielectric Constant and Chemical Stability