SCHATTENBURG Mark | Massachusetts Institute of Technology
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概要
関連著者
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SCHATTENBURG Mark
Massachusetts Institute of Technology
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SLOCUM Alexander
Massachusetts Institute of Technology
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FOREST Craig
Massachusetts Institute of Technology
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Smith Henry
Massachusetts Institute of Technology
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Heilmann Ralf
Massachusetts Inst. Of Technology Center For Space Research
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AKILIAN Mireille
Massachusetts Institute of Technology
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TRUMPER David
Massachusetts Institute of Technology
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SPENKO Matthew
Massachusetts Inst. of Technology, Center for Space Research
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SUN Yanxia
Massachusetts Inst. of Technology, Center for Space Research
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Sun Yanxia
Massachusetts Inst. Of Technology Center For Space Research
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Spenko Matthew
Massachusetts Inst. Of Technology Center For Space Research
著作論文
- Thin optic constraint
- Repeatable and accurate assembly of X-ray foil optics
- X-Ray Nanolithography-the Clearest Path to 0.1 and Sub-0.1μm ULSI : X-Ray Lithography