Shimogaki Yukihiro | Department Of Materials Engineering School Of Engineering Univ. Of Tokyo

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• Department Of Materials Engineering School Of Engineering Univ. Of Tokyoの論文著者

Department Of Materials Engineering School Of Engineering Univ. Of Tokyo | 論文

• Improvement of TiN Flow Modulation Chemical Vapor Deposition from TiCl_4 and NH_3 by Introducing Ar Purge Time

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