Koshiba S | Nippon Sanso Corporation Technology Division
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概要
Nippon Sanso Corporation Technology Division | 論文
- A New Reactor for Metalorganic Chemical Vapor Deposition Equipped with an Internal Rotary Flow Selector
- Application of Penta-Di-Methyl-Amino-Tantalum to a Tantalum Source in Chemical Vapor Deposition of Tantalum Oxide Films