Okuyama K | Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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概要
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University | 論文
- Fabrication and Characterization of SiO_2 Particles Generated by Spray Method for Standards Aerosol
- Direct Measurement of Nucleation and Growth Modes in Titania Nanoparticles Generation by a CVD Method
- Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System
- Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O_2/He, and TEOS/O_3/He Systems
- Gas-Phase Nucleation in an Atmospheric Pressure Chemical Vapor Deposition Process for SiO_2 Films Using Tetraethylorthosilicate (TEOS)